Germany – Laboratory, optical and precision equipments (excl. glasses) – Ätzanlage zum tiefen Silicium-Ätzen für MEMS
Procurement opportunity published by Ruhr-Universität Bochum, recorded from TED — Tenders Electronic Daily. The facts below are the source's; anything derived is labelled.
PetroHrys is not affiliated with the buyer and does not submit bids. Always verify terms on the official notice.
What the source published
Recorded as published. Dates without a stated time zone are shown exactly as written.
- Buyer
- Ruhr-Universität Bochum
- Where the work is
- Germany
- Status
- Open guaranteed by the source query
- Published
- 2026-08-13
- Official reference
- b750304c-da88-45ba-b95f-4b3656e001d8
- Source
- TED — Tenders Electronic Daily
- Procurement platform
- TED — Tenders Electronic Daily
- Electronic submission
- Not stated
Classification
Assigned by the source under CPV or UNSPSC. These are separate vocabularies and are never mapped onto one another.
- CPV 38000000 — Laboratory, optical and precision equipments (excl. glasses)
Description
Die Ruhr-Universität Bochum beabsichtigt eine DRIE Ätzanlage zu beschaffen, die im Forschungslabor Mikroelektronik Bochum für Wafer-Substrate bis 200 mm Durchmesser eingesetzt werden soll. Sie soll auf dem Gebiet der Silicium-basierten Mikro-Elektro-Mechanischen Systeme (MEMS) für das tiefe anisotrope Siliciumätzen auf Basis eines zyklischen Ätzprozesses (DRIE, "BOSCH-Prozess") eingesetzt werden…
Extract as recorded from the source. Read the official notice for the full text.
Supplier profile relevance
Derived by matching the published classification codes and title against supplier profiles. This is relevance to a profile — not a probability of winning, and not an assessment of competition.
No supplier profile matches this opportunity strongly enough to report.
Where this record came from
Every source that published this procurement. One opportunity, however many sources carried it.
- TED — Tenders Electronic Daily — 562332-2026
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Limitations
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